The Helios Nanolab G3 UC from FEI (Thermo Fisher) combines a FIB (Focused Ion Beam) with a modern scanning electron microscope (SEM) => dual beam device.
With the electron beam, high-resolution images of the sample surface can be made and with the gallium ion beam, sample material can be removed. This makes the Helios ideal for preparing thin samples for further investigations in a transmission electron microscope.
However, the combination of both types of radiation (electron and ion beam) also allows direct 3D investigations of the sample material in the Helios.
Like all BeEM EM microscopes, the Helios is also equipped with an EDX system of OXFORD Instruments. The combination of the layered removal of the sample material with the EDX analysis allows the creation of 3D models of individual sample phases.
