Scanning electron microscopes (SEM) can image the surface of samples down to the nanometer range. For this purpose, a finely focused electron beam is scanned in a raster over the sample surface. Several different detectors provide various information about the sample.

In transmission electron microscopy (TEM), the samples to be examined are penetrated through (transmission). This allows the examination of the internal structure of the samples. The samples must be sufficiently thin, which requires special sample preparation.

Modern focused ion beam (FIB) microscopes, like our FIB "Helios UC3," combine a scanning electron microscope (SEM) with a focused ion beam (dual beam FIB). With the focused ion beam, material can be precisely removed from the sample, enabling the preparation of thin samples for TEM examination or obtaining 3D information about the sample's interior.

Environmental scanning electron microscopes make it possible to examine samples under variable pressure conditions and gas atmospheres. Therefore, they are also referred to as "environmental" scanning electron microscopes (ESEM).

In addition to pure image generation (imaging techniques), electron microscopes can also be used to answer various analytical questions due to the different interaction processes of the electron beam with the sample material, such as determining the elemental composition of the sample, its crystal structure, etc. The combination of different methods can also be used in conjunction with powerful computers to generate 3D models of the sample structure or individual sample phases.

Good sample preparation is crucial in electron microscopy for the success of the subsequent electron microscopic examination. Depending on the electron microscopic method and properties of the samples, different preparations must be carried out.