Using the EBSD (Electron Backscatter Diffraktion) method, it is possible to determine the crystal structure and orientation of the crystals (to the incident beam) in a sample.
A very good sample preparation (embedding, grinding and polishing) of the sample material to be examined is important for success.
The beam of electrons is diffracted on the sample surface, which is usually installed at an angle of 70°, and then hits a phosphor screen connected to a camera. When the electron beam is diffracted at the different lattice faces of the crystal, constructive interference occurs if the Bragg condition is fulfilled. The diffracted beam thus contains the information necessary to determine the crystal system and its orientation.
When the diffracted beam hits the phosphor screen, the information is converted into a two-dimensional interference pattern (Kikuchi pattern).
Finally, the crystal system and its orientation to the incident beam can be determined by evaluating the Kikuchi pattern. By scanning a specific sample area and the simultaneous recording and evaluation of the Kikuchi pattern, color-coded Euler angle maps are created that can be further evaluated, e.g. to be able to determine textures using pole figures.
EBSD is only available on the Zeiss Supra 55 VP. If you have any further questions, please contact the person responsible for the Zeiss Supra: