Oxygen measurement is widely used in industrial processes and life science applications. Applications, for example, are the monitoring and control of combustion processes, emission measurement, control of compartment air but also monitoring and control of oxygen concentration for respirators e.g. for anesthetics.

The aim of this research project is the development of a paramagnetic oxygen sensor using MEMS technology. Paramagnetic oxygen sensors are based on the paramagnetic characteristic of oxygen. While a diamagnetic gas is disgusted a paramagnetic gas is retracted into a magnetic field. This characteristic is used to deflect the probe gas into the measuring channel depending on its oxygen concentration. By gauging the flow velocity in the measurement and the reference channel the oxygen concentration of the probe gas can be measured.

Due to the fabrication in MEMS technology in combination with a novel sensor design new applications are possible. For example the use in mobile respirators is imaginable. 

Contact:

Stefan Vonderschmidt

Funding:

This research project is sponsored by Deutsche Forschungs Gesellschaft (DFG).