Dr. Davood Babazadeh

Gastdozent

Kontakt

Dr. Davood Babazadeh
E-6 Elektrische Energietechnik
  • Elektrische Energietechnik
Harburger Schloßstraße 22a,
21079 Hamburg
Gebäude HS22a, Raum 2.018
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TUHH Open Research (TORE)

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Lehrveranstaltungen

Stud.IP
link to course in Stud.IP Studip_icon
Microsystem Engineering (VL)
Subtitle:
Module: Microsystem Engineering
Semester:
WiSe 23/24
Course type:
Lecture
Course number:
lv680_w22
Lecturer:
Dr. Timo Lipka, M. Sc Konstanze Schober
Description:

Object and goal of MEMS

Scaling Rules

Lithography

Film deposition

Structuring and etching

Energy conversion and force generation

Electromagnetic Actuators

Reluctance motors

Piezoelectric actuators, bi-metal-actuator

Transducer principles

Signal detection and signal processing

Mechanical and physical sensors

Acceleration sensor, pressure sensor

Sensor arrays

System integration

Yield, test and reliability

Pre-requisites:
Basic courses in physics, mathematics and electric engineering
Performance accreditation:
Written exam
ECTS credit points:
4
Stud.IP informationen about this course:
Home institute: Institut für Mikrosystemtechnik (E-7)
Registered participants in Stud.IP: 122
Documents: 14