Equipment
Simulations |
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FDTD | MEEP |
FIT, FEM | CST |
Ray tracing | Zemax |
8 Workstations (2 Intel Gold CPUs, 3.6 GHz, 4 Cores and 192 GB RAM each) | |
2 GPU computing cluster (2 NVIDIA Quadro GP100 (3582 shader, 16 GB HBM2) and with 192 GB and 384 GB RAM) |
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2 GPU computing cluster (2x4 Nvidia Tesla C2070) | CAD Network |
Light sources |
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Q-switched Nd:YAG laser and THG pumped OPO (355 nm – 2.5 µm) |
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High performance CW tunable laser sources with 1260 nm – 1640 nm wavelength range | Agilent |
Femtosecond laser (100fs, 100mW, 100MHZ, 1550nm) | Menlo |
ASE sources (40 mW and 100 mW, 1525 – 1605nm) | Amonics |
Supercontinuum source (500 mW, 460nm - 2400nm ) | NKT Photonics (Coheras) |
Supercontinuum MIR source (1.1-4.2 µm, 450W) | NKT Photonics |
Solar Simulator (AAA, 50x50 mm) | Enli Technology |
Optical setups |
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Photoelectrochemical setup (295-1020 nm, QE/IPCE/PCS, 10µHz-12 MHz) | Zahner |
Pump-probe setup (two pulses, 1530-1580nm, 1-10ps) | Menlo |
Automatic nanometer positioning system for fiber to chip coupling | Melles Griot |
External Mach-Zehnder Interferometer |
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Teng-Man measurement setup (Pockels effect) |
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Spectrometers |
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Spectroscopic ellipsometer (193 nm – 25 nm, mapping X-Y 200 mm, photometry, Mueller matrix, heat stage 1000 °C, vacuum 1e-2 mbar, electrochemical cell, porosimetry) | Semilab |
Fluorimeter (detector 200-870 nm, 450 W xenon, pulsed lasers 405-640 nm, excitation double monochromator, integrating sphere, 2 ns to 50 µs decay time) | Hamamatsu, Edinburgh Instruments |
FTIR Spectrometer (800nm-20µm, integrating Sphere, variable angle Reflection - 13°-83°C, extra MCT detector) | Bruker |
FTIR-Microscope (10x, 36x, Grazing incidence) | Bruker |
UV-Vis-NIR Spectrometer (200nm-3300nm, incl. integrating sphere and variabel angle Reflection and Transmission) | Perkin Elmer |
Vis-NIR CCD-Spectrometer for optical microscope | Zeiss, A.S. & Co |
Czerny-Turner monochromator with detectors (1.6-12µm, with fiber adapter) | HORIBA Jobin Yvon |
High resolution optical spectrum analyzers (600-1750nm) | Ando |
Optical monochromator (1/4m) |
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Thermal analysis |
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Heating stage with vacuum ports (1500°C, 1e-3mbar, 7mm diameter, sapphire windows) | Linkam |
Vacuum furnice (2000°C, 1e-6mbar, 90x50mm) | RDWebb |
Hot disc thermal conductivity setup (0.005-1.2 W/mK, RT-1000°C or vacuum 1e-6mbar) | Hot Disk |
Laser Flash Analyzer (0.001-10cm2/s, 1600°C, 1e-5mbar) | Linseis |
Surface analysis |
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Surface profilometer | Dektak |
Confocal laser scanning microscope (405nm laser, z-resolution <10nm) | Zeiss |
Sample preparation / manufacturing |
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Clean room (class 100) |
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Spin-Coater |
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Vacuum drying ovens |
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Mask aligner | Karl Süss |
Electron beam evaporator (chrome, gold, silver, aluminum) | Leybold |
Thermal evaporator (gold) | Leybold |
RF and DC sputtering | Leybold |
PECVD |
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Two-photon polymerisation 3D laser lithography (Galvo-scanner, Photoresists: IP-L, IP-G, IP-Dipp; 100X objective, 63X air objective, Dip-in objective) | Nanoscribe |
Other equipment |
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Gas chromatography (H2, 10 ppm, O2, 10 ppm) | S+H Analytik |
Critical point drier | Science Services |
Broadand dielectric measurement system (mHz-10GHz) |
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InGaAs – NIR camera | Allied Vision Technologies |