Prof. Dr.-Ing. Roland Harig

Honorary Professor

Contact

Prof. Dr.-Ing. Roland Harig
E-6 Elektrische Energietechnik
  • Elektrische Energietechnik
Office Hours
nach Vereinbarung
Harburger Schloßstraße 36,
21079 Hamburg
Building HS36, Room C2 1.009

Previous activity

until 03/2015
Head of Research Area Optical Measurement Technology (Infrared Measurment Technology) at the Institute of Measurement Technology / TUHH

Publications

TUHH Open Research (TORE)

2012

2011

2008

Courses

Stud.IP
link to course in Stud.IP Studip_icon
Microsystem Engineering (VL)
Subtitle:
Module: Microsystem Engineering
Semester:
WiSe 23/24
Course type:
Lecture
Course number:
lv680_w22
Lecturer:
Dr. Timo Lipka, M. Sc Konstanze Schober
Description:

Object and goal of MEMS

Scaling Rules

Lithography

Film deposition

Structuring and etching

Energy conversion and force generation

Electromagnetic Actuators

Reluctance motors

Piezoelectric actuators, bi-metal-actuator

Transducer principles

Signal detection and signal processing

Mechanical and physical sensors

Acceleration sensor, pressure sensor

Sensor arrays

System integration

Yield, test and reliability

Pre-requisites:
Basic courses in physics, mathematics and electric engineering
Performance accreditation:
Written exam
ECTS credit points:
4
Stud.IP informationen about this course:
Home institute: Institut für Mikrosystemtechnik (E-7)
Registered participants in Stud.IP: 122
Documents: 14