Honorary Professor
until 03/2015 Head of Research Area Optical Measurement Technology (Infrared Measurment Technology) at the Institute of Measurement Technology / TUHH
Object and goal of MEMS
Scaling Rules
Lithography
Film deposition
Structuring and etching
Energy conversion and force generation
Electromagnetic Actuators
Reluctance motors
Piezoelectric actuators, bi-metal-actuator
Transducer principles
Signal detection and signal processing
Mechanical and physical sensors
Acceleration sensor, pressure sensor
Sensor arrays
System integration
Yield, test and reliability