Home | ![]() |
Publikationen | ![]() |
Scanning Phase-Mask DUV Inscription of Short-Period&nbs |
J. Huster, Jost Müller, H. Renner, E. Brinkmeyer, Scanning Phase-Mask DUV Inscription of Short-Period Large-Area Photoresist Gratings J. Lightwave Technol. 29(17), pp. 2621-2628 (2011) |
![]() |
![]() |