A. Harke, M. Krause, Jörg Müller, Low-loss single-mode amorphous silicon waveguides Electron. Lett. 41(25), pp. 1377-1379 (2005)
Abstract: Amorphous silicon waveguides were obtained by plasma-enhanced chemical-vapor deposition and anisotropic plasma etching. Rectangular multi-mode waveguides as well as single-mode ridge waveguides were fabricated. Scattered light measurements at 1550nm (1300nm) wavelength showed a low propagation loss of 0.5dB/cm (1.6dB/cm) for multi-mode waveguides and 2.0dB/cm (5.0dB/cm) for highly-confined single-mode waveguides.
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m.krause@tu-harburg.de