Amorphous silicon 3D-Tapers for Si photonic wires fabricated with shadow masks

Amorphous silicon 3D-Tapers for Si photonic wires&

A. Harke, T. Lipka, J. Amthor, O. Horn, M. Krause, Jörg Müller,
Amorphous silicon 3D-Tapers for Si photonic wires fabricated with shadow masks
IEEE Photon. Technol. Lett. 20(17), pp. 1452-1454 (2008)

Abstract: Three dimensional taper structures made from PECV-deposited hydrogenated amorphous silicon were evaluated by calculating the deposition profiles with a line-of-sight model and the corresponding mode profiles with a full-vectorial mode solver. The tapers were fabricated with shadow-masks made from KOH-etched Si-wafers, and with the tapers light was coupled into 500nm wide photonic wires from lensed fibers.

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